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1. |
To grow the polysilicon gate layer, which of the following chemical is used for chemical vapour deposition? |
A. | Silicon Nitride(Si<sub>3</sub>N<sub>4</sub>) |
B. | Silane gas(SiH<sub>4</sub>) |
C. | Silicon oxide |
D. | None of the mentioned |
Answer» C. Silicon oxide | |