1.

Which of the following gases commonly used in CVD are pyrophoric, toxic, and flammable?(A) Phosphine(B) Argon(C) Nitrogen Oxide(D) Silane(E) NitrogenChoose the most appropriate answer from the options given below:(1) (B) and (C) only(2) (C) and (E) only(3) (B) and (E) only(4) (A) and (D) only

A. 1
B. 2
C. 3
D. 4
Answer» E.


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