In MOS capacitor, the preference in dielectric layer is given to Silicon Nitride (Si3N4) because

In MOS capacitor, the preference in dielectric layer is given to Silic

1.	In MOS capacitor, the preference in dielectric layer is given to Silicon Nitride (Si₃N₄) because
A.	It makes capacitor non-polar
B.	It contain a small resistance
C.	It offers less processing step
D.	It reduces failure mechanism
Answer» B. It contain a small resistance