1.

Consider the following functions: 1. To mask against diffusion or ion implant. 2. To act as a component in MOS devices. 3. To provide low resistivity paths. 4. To facilitate the entry of dopants. The functions of an oxide layer on a silicon wager would include:

A. 1 and 2
B. 2 and 3
C. 3 and 4
D. 1 and 4
Answer» B. 2 and 3


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